Optical Engineering

CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior by Flora Li,Arokia Nathan

By Flora Li,Arokia Nathan

As the deep-ultraviolet (DUV) laser expertise keeps to mature, increasingly more commercial and production functions are rising. for instance, the hot iteration of semiconductor inspection platforms is being driven to photograph at more and more shorter DUV wavelengths to facilitate inspection of deep sub-micron good points in built-in circuits. DUV-sensitive charge-coupled machine (CCD) cameras are widespread for those purposes. even supposing CCD cameras which are responsive at DUV wavelengths at the moment are to be had, their long term balance remains to be a massive obstacle. This publication describes the degradation mechanisms and long term functionality of CCDs within the DUV, besides new result of equipment functionality at those wavelengths.

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