Optical Engineering

CMOS Hotplate Chemical Microsensors (Microtechnology and by Markus Graf,Diego Barrettino,Henry P. Baltes,Andreas

By Markus Graf,Diego Barrettino,Henry P. Baltes,Andreas Hierlemann

this can be the 1st entire e-book on microhotplate-based chemical sensor platforms in CMOS-technology. It covers all elements of profitable sensor prototyping: thought of transducer modelling, microelectronics layout concerns, approach layout concerns, and matters concerning process and machine microfabrication, packaging, and checking out. various diversified hotplates for various operation stipulations is distinctive and a family members of metal-oxide-covered microhotplate-based microsensor platforms with expanding complexity is gifted. those platforms belong to a brand new iteration of chemical microsensors and signify examples of the profitable integration of nanomaterials, microtechnology and microelectronics. The e-book presents scholars, scientists and engineers with an obtainable creation to the sector of microhotplate-based chemical sensing, with the entire useful basic wisdom integrated. past that, it additionally offers specific details on all very important matters touching on complicated high-performance CMOS chemical microsensor platforms; as a result it's going to even be worthwhile to specialists already accustomed to the field.

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