Optical Engineering

Femtosecond Laser 3D Micromachining for Microfluidic and by Koji Sugioka,Ya Cheng

By Koji Sugioka,Ya Cheng

Femtosecond lasers unfolded new road in fabrics processing because of its certain positive aspects of ultrashort pulse width and intensely excessive top depth. some of the most vital gains of femtosecond laser processing is that robust absorption should be triggered even by means of fabrics that are obvious to the femtosecond laser beam because of nonlinear multiphoton absorption. The multiphoton absorption permits us to accomplish not just floor but additionally three-dimensionally inner microfabrication of obvious fabrics similar to glass. This strength makes it attainable to at once fabricate third-dimensional microfluidics, micromechanics, microelectronics and microoptics embedded within the glass. extra, those microcomponents might be simply built-in in one glass microchip by means of the easy method utilizing the femtosecond laser. hence, the femtosecond laser processing offers a few merits over traditional tools reminiscent of conventional semiconductor processing or gentle lithography for fabrication of microfluidic, optofludic and lab-on-a-chip units and thereby many researches in this subject are presently being performed. This e-book offers a finished assessment at the state-of-the-art and destiny customers of femtosecond laser processing for fabrication of microfluidics and optofludics together with precept of femtosecond laser processing, distinctive fabrication approaches of every microcomponent and sensible purposes to biochemical analysis.

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